A history of scanning electron microscopy developments: Towards "wet-STEM" imaging

被引:176
作者
Bogner, A.
Jouneau, P. -H.
Thollet, G.
Basset, D.
Gauthier, C.
机构
[1] INSA, UMR CNRS 5510, Grp Etudes Met Phys & Phys Mat, F-69621 Villeurbanne, France
[2] Total France, Ctr Rech Solaize, F-69360 Solaize, France
[3] CEA Grenoble, DRFMC SP2M, Lab Etudes Mat Microscopie Avancee, F-38054 Grenoble, France
关键词
electron microscopy; STEM-in-SEM; transmission mode; scattered electrons; environmental scanning electron microscopy; ESEM;
D O I
10.1016/j.micron.2006.06.008
中图分类号
TH742 [显微镜];
学科分类号
摘要
A recently developed imaging mode called "wet-STEM" and new developments in environmental scanning electron microscopy (ESEM) allows the observation of nano-objects suspended in a liquid phase, with a few manometers resolution and a good signal to noise ratio. The idea behind this technique is simply to perform STEM-in-SEM, that is SEM in transmission mode, in an environmental SEM. The purpose of the present contribution is to highlight the main advances that contributed to development of the wet-STEM technique. Although simple in principle, the wet-STEM imaging mode would have been limited before high brightness electron sources became available, and needed some progresses and improvements in ESEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:390 / 401
页数:12
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