Ultra high repetition rate (133 MHz) laser ablation of aluminum with 1.2-ps pulses

被引:86
作者
Lapczyna, M [1 ]
Chen, KP
Herman, PR
Tan, HW
Majoribanks, RS
机构
[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada
[2] Univ Toronto, Dept Phys, Toronto, ON M5S 1A7, Canada
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期
关键词
D O I
10.1007/s003390051552
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study reports on the multi-pulse ablation of aluminum foils by bursts of mode-locked pulses from a feedback-controlled Nd:glass laser (1054nm). The 2-mu s train consists of about 250 pulses of 1.2 ps duration and 7.5 ns pulse-to-pulse separation. The bursts provide a new mode of laser fluence delivery, combining long-pulse heating with the advantages of ultrashort laser material interactions. Results show that clean through-holes can be cut through 200-mu m foils with a single pulse train. In holes produced using near-threshold machining,a 7:1 aspect ratio was observed with a taper half-angle of around 3 degrees. The etch depths and surface morphology of the processed surfaces are qualitatively characterized for fluences between 80 J/cm(2) and 9 kJ/cm(2), and for a range of foil thicknesses 12.5-200 mu m.
引用
收藏
页码:S883 / S886
页数:4
相关论文
共 10 条
[1]   Short-pulse UV laser ablation of solid and liquid metals: Indium [J].
Gotz, T ;
Stuke, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 64 (06) :539-543
[2]   Laser micromachining of 'transparent' fused silica with 1-ps pulses and pulse trains [J].
Herman, PR ;
Oettl, A ;
Chen, KP ;
Marjoribanks, RS .
COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS, 1999, 3616 :148-155
[3]   Laser ablation and micromachining with ultrashort laser pulses [J].
Liu, X ;
Du, D ;
Mourou, G .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1997, 33 (10) :1706-1716
[4]   HIGH-CONTRAST TERAWATT CHIRPED-PULSE-AMPLIFICATION LASER THAT USES A 1-PS ND-GLASS OSCILLATOR [J].
MARJORIBANKS, RS ;
BUDNIK, FW ;
ZHAO, L ;
KULCSAR, G ;
STANIER, M ;
MIHAYCHUK, J .
OPTICS LETTERS, 1993, 18 (05) :361-363
[5]   Precise laser ablation with ultrashort pulses [J].
Momma, C ;
Nolte, S ;
Chichkov, BN ;
vonAlvensleben, F ;
Tunnermann, A .
APPLIED SURFACE SCIENCE, 1997, 109 :15-19
[6]   Short-pulse laser ablation of solid targets [J].
Momma, C ;
Chichkov, BN ;
Nolte, S ;
vonAlvensleben, F ;
Tunnermann, A ;
Welling, H ;
Wellegehausen, B .
OPTICS COMMUNICATIONS, 1996, 129 (1-2) :134-142
[7]  
PREUSS S, 1995, APPL PHYS A-MATER, V61, P33, DOI 10.1007/BF01538207
[8]   Laser-solid interaction in the femtosecond time regime [J].
vonderLinde, D ;
SokolowskiTinten, K ;
Bialkowski, J .
APPLIED SURFACE SCIENCE, 1997, 109 :1-10
[9]  
ZHAO JX, 1999, SPIE P, V3618
[10]  
ZHU X, 1999, APPL PHYS A, P1