Spin coating as a method for polymer molecular weight determination

被引:95
作者
Schubert, DW
机构
[1] Max-Planck-Inst. F. Polymerforschung, D-55021 Mainz
关键词
D O I
10.1007/s002890050035
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
The spin coating process was investigated using solutions of polystyrene dissolved in toluene. The residual film thickness depends not only on the spinning velocity and concentration, but also on molecular weight. Specific scaling exponents were determined. The molecular weight dependence was investigated in detail to reveal the type of molecular weight average. This enables a fast determination of the molecular weight by use of spin coating. The use of model molecular weight distributions yields a relation to number M(n) and weight M(w) average molecular weight.
引用
收藏
页码:177 / 184
页数:8
相关论文
共 13 条
[1]   THE EFFECTS OF GAS-PHASE CONVECTION ON MASS-TRANSFER IN SPIN COATING [J].
BORNSIDE, DE ;
BROWN, RA ;
ACKMANN, PW ;
FRANK, JR ;
TRYBA, AA ;
GEYLING, FT .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (02) :585-600
[2]  
BRANDRUP J, 1989, POLYM HDB
[4]   AN INVESTIGATION OF THE THICKNESS VARIATION OF SPUN-ON THIN-FILMS COMMONLY ASSOCIATED WITH THE SEMICONDUCTOR INDUSTRY [J].
DAUGHTON, WJ ;
GIVENS, FL .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) :173-179
[5]  
JENEKHE SA, 1987, ACS S SERIES, V346
[6]   Initial stages of interdiffusion of PMMA across an interface [J].
Kunz, K ;
Stamm, M .
MACROMOLECULES, 1996, 29 (07) :2548-2554
[7]   CHARACTERISTICS OF RESIST FILMS PRODUCED BY SPINNING [J].
MEYERHOFER, D .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) :3993-3997
[8]  
PANIEZ P, 1983, CNET TECHNICAL REPOR
[9]   Influence of chain length on the interface width of an incompatible polymer blend [J].
Schubert, DW ;
Stamm, M .
EUROPHYSICS LETTERS, 1996, 35 (06) :419-424
[10]  
SCHUBERT DW, IN RPESS