Investigation of Fermi-level pinning at silicon/porous- silicon interface by vibrating capacitor and surface photovoltage measurements

被引:17
作者
Mizsei, J [1 ]
Shrair, JA [1 ]
Zólomy, I [1 ]
机构
[1] Tech Univ Budapest, Dept Electron Devices, H-1521 Budapest, Hungary
关键词
porous silicon; passivation; surface voltage; vibrating capacitor; SPV; Fermi-level pinning;
D O I
10.1016/j.apsusc.2004.05.110
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this paper the PSi-silicon interface properties have been investigated by surface photovoltage (SPV) and vibrating capacitor (Kelvin) measurements. These methods are sensitive for the work function change and for the PSi-silicon interface potential barrier. The porous silicon (PSi) layer contains huge number of volume traps. Theoretical considerations support the high band bending (near to intrinsic condition or inversion) at the PSi-silicon interface, as high charge carrier concentration at the interface would result in high charge injection into the porous silicon. SPV and vibrating capacitor experiments show that the PSi volume charge and PSi-silicon interface charge tends to shift the interface to depleted state, near to the intrinsic condition (Fermi-level pinning). The interface conditions are summarised in the article and compared with the surface properties of the earlier discussed silicon-dioxide-covered silicon system. Light excitation can affect the charge stored in the PSi, thus the potential barrier at the PSi-silicon interface: the light induced surface voltage transients reveal this charge injection effect. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:376 / 388
页数:13
相关论文
共 23 条
[1]   Computer analysis of photon-induced non-equilibrium phenomena at Si and AlGaAs surfaces [J].
Adamowicz, B ;
Hasegawa, H .
VACUUM, 2000, 57 (02) :111-120
[2]  
[Anonymous], MAT TODAY JAN
[3]   Porous silicon as an intermediate layer for thin-film solar cell [J].
Bilyalov, R ;
Stalmans, L ;
Beaucarne, G ;
Loo, R ;
Caymax, M ;
Poortmans, J ;
Nijs, J .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 65 (1-4) :477-485
[4]   Use of porous silicon antireflection coating in multicrystalline silicon solar cell processing [J].
Bilyalov, RR ;
Stalmans, L ;
Schirone, L ;
Lévy-Clément, C .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (10) :2035-2040
[5]   Surface photovoltage spectroscopy of porous silicon [J].
Burstein, L ;
Shapira, Y ;
Partee, J ;
Shinar, J ;
Lubianiker, Y ;
Balberg, I .
PHYSICAL REVIEW B, 1997, 55 (04) :R1930-R1933
[6]   In-situ monitoring of surface chemistry and charge transfer at semiconductor surfaces [J].
Fefer, E ;
Kronik, L ;
Leibovitch, M ;
Shapira, Y ;
Riedl, W .
APPLIED SURFACE SCIENCE, 1996, 104 :61-67
[7]   Photovoltage and photo-induced charge trapping in porous silicon [J].
Kashkarov, PK ;
Konstantinova, EA ;
Matveeva, AB ;
Timoshenko, VY .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 62 (06) :547-551
[8]   Nickel deposition on porous silicon utilizing lasers [J].
Kordás, K ;
Leppävuori, S ;
Békési, J ;
Nánai, L ;
Remes, J ;
Vajtai, R ;
Szatmári, S .
APPLIED SURFACE SCIENCE, 2002, 186 (1-4) :232-236
[9]   Manufacturing of porous silicon;: porosity and thickness dependence on electrolyte composition [J].
Kordás, K ;
Remes, J ;
Beke, S ;
Hu, T ;
Leppävuori, S .
APPLIED SURFACE SCIENCE, 2001, 178 (1-4) :190-193
[10]   Surface photovoltage phenomena: theory, experiment, and applications [J].
Kronik, L ;
Shapira, Y .
SURFACE SCIENCE REPORTS, 1999, 37 (1-5) :1-206