Simple method for synthesis of silicon nanowire: Pulsed laser deposition in furnace from p-Si wafer target

被引:7
作者
Jeon, Kyung Ah [1 ]
Kim, Jong Hoon [1 ]
Lee, Sang Yeol [1 ]
机构
[1] Yonsei Univ, Dept Elect & Elect Engn, Seoul 120749, South Korea
关键词
D O I
10.1016/j.progsolidstchem.2005.11.018
中图分类号
O61 [无机化学];
学科分类号
070301 [无机化学]; 081704 [应用化学];
摘要
Si nanowires (NWs) were fabricated in a vacuum furnace using a Nd:YAG pulsed laser with the wavelength of 325 nm. Commercial p-type Si wafer is used for the target, and no catalytic materials are used. Scanning electron microscopy (SEM) images indicate that the diameters of Si NWs ranged from 10 to 150 nm. Si NWs have various sizes and shapes with a substrate position inside the furnace, and their morphologic construction is reproducible. The formation mechanism of the NWs is discussed. (C) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:107 / 112
页数:6
相关论文
共 12 条
[1]
Functional nanoscale electronic devices assembled using silicon nanowire building blocks [J].
Cui, Y ;
Lieber, CM .
SCIENCE, 2001, 291 (5505) :851-853
[2]
Indium phosphide nanowires as building blocks for nanoscale electronic and optoelectronic devices [J].
Duan, XF ;
Huang, Y ;
Cui, Y ;
Wang, JF ;
Lieber, CM .
NATURE, 2001, 409 (6816) :66-69
[3]
LASER SPUTTERING .3. THE MECHANISM OF THE SPUTTERING OF METALS LOW-ENERGY DENSITIES [J].
KELLY, R ;
ROTHENBERG, JE .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :755-763
[4]
Growth of amorphous silicon nanowires [J].
Liu, ZQ ;
Zhou, WY ;
Sun, LF ;
Tang, DS ;
Zou, XP ;
Li, YB ;
Wang, CY ;
Wang, G ;
Xie, SS .
CHEMICAL PHYSICS LETTERS, 2001, 341 (5-6) :523-528
[5]
A laser ablation method for the synthesis of crystalline semiconductor nanowires [J].
Morales, AM ;
Lieber, CM .
SCIENCE, 1998, 279 (5348) :208-211
[6]
Superstrong nanotubes show they are smart, too [J].
Service, RF .
SCIENCE, 1998, 281 (5379) :940-942
[7]
Touloukian Y.S., 1975, TPRC DATA SERIES VOL, V12
[8]
STOICHIOMETRY AND THICKNESS VARIATION OF YBA2CU3O7-X IN OFF-AXIS PULSED-LASER DEPOSITION [J].
TRAJANOVIC, Z ;
SENAPATI, L ;
SHARMA, RP ;
VENKATESAN, T .
APPLIED PHYSICS LETTERS, 1995, 66 (18) :2418-2420
[9]
Si nanowires grown from silicon oxide [J].
Wang, N ;
Tang, YH ;
Zhang, YF ;
Lee, CS ;
Bello, I ;
Lee, ST .
CHEMICAL PHYSICS LETTERS, 1999, 299 (02) :237-242
[10]
Mechanism of oxide-assisted nucleation and growth of silicon nanostructures [J].
Zhang, RQ ;
Chu, TS ;
Cheung, HF ;
Wang, N ;
Lee, ST .
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2001, 16 (1-2) :31-35