共 43 条
[1]
Hydrodynamic regimes of UV laser ablation of polymers
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1997, 64 (06)
:561-572
[3]
BEAVIS RC, 1991, CHEM PHYS LETT, V181, P489
[5]
Lithography with 157 nm lasers
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1997, 15 (06)
:2112-2116