Polycrystalline nitride semiconductor light-emitting diodes fabricated on quartz substrates

被引:70
作者
Bour, DP [1 ]
Nickel, NM [1 ]
Van de Walle, CG [1 ]
Kneissl, MS [1 ]
Krusor, BS [1 ]
Mei, P [1 ]
Johnson, NM [1 ]
机构
[1] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA
关键词
D O I
10.1063/1.126291
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate the feasibility of polycrystalline nitride semiconductor light-emitting diodes (LEDs). Here, polycrystalline LEDs were deposited on quartz substrates, incorporating a layer structure identical to that used for epitaxially grown LEDs. The deposition exhibits a tendency to produce c-oriented crystallites. Violet-blue (430 nm) operation of a polycrystalline LED is demonstrated, with spectral width of 38 nm, and emission efficiency approximately two orders of magnitude lower than for single-crystal LEDs. These LEDs could potentially be incorporated in large-area displays, since the deposition of polycrystalline materials avoids single-crystal substrates required for conventional nitride semiconductor light emitters. (C) 2000 American Institute of Physics. [S0003-6951(00)02115-X].
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收藏
页码:2182 / 2184
页数:3
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