Characterization of micro-channels fabricated by in-water ablation of femtosecond laser pulses

被引：22

作者：

Iga, Y

Ishizuka, T

Watanabe, W

Itoh, K

Li, Y

Nishii, J

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan

[2] Peking Univ, Dept Phys, Beijing 100871, Peoples R China

[3] Natl Inst Adv Ind Sci & Technol, Kansai Ctr, Photon Res Inst, Ikeda, Osaka 5638577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2004年 / 43卷 / 7A期

关键词：

femtosecond laser; silica glass; micromachining; microchannel; microdrilling;

D O I：

10.1143/JJAP.43.4207

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Femtosecond laser pulses are used to drill high-aspect-ratio microchannels from the rear surface of silica glass, which is in contact with water. The relationship between the diameter of the channel and the incident energy of laser pulses is investigated. The diameter of the channel was varied from 2 pm to 50 pm by increasing the energy. The morphology of the entrance and inner walls of the channels was analyzed by scanning electron microscopy. The capillary phenomena in the dead-end microchannels in contact with water are investigated. The realization of circular three-dimensional channels is demonstrated.

引用

收藏

页码：4207 / 4211

页数：5

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