Microstructure and electrical properties of Sb-Sn-O thin films

被引：11

作者：

Kojima, M

Kato, H

Gatto, M

机构：

[1] Nagoya Munic. Indust. Res. Institute, Nagoya, 3-4-41, Rokuban, Atsuta-ku

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1997年 / 218卷

关键词：

D O I：

10.1016/S0022-3093(97)00142-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Transmission electron microscopic observations have confirmed that black Sb-Sn-O films deposited by spray pyrolysis at 500 degrees C are polycrystalline while transparent Sb-Sn-O films deposited at 350 degrees C are amorphous. These results are discussed in terms of the energyband theory on the basis of experimental results of the electrical properties of these films. (C) 1997 Elsevier Science B.V.

引用

页码：230 / 234

页数：5

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