Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers

被引：28

作者：

Kim, J ^{[1
]}

Berberoglu, H ^{[1
]}

Xu, XF ^{[1
]}

机构：

[1] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA

来源：

JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS | 2004年 / 3卷 / 03期

关键词：

photoetchable glass ceramics; excimer laser; femtosecond laser; micromachining; 3-D machining;

D O I：

10.1117/1.1759330

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (lambda = 248 nm, tau = 25 ns) is used for surface micromachining, and a femtosecond laser (lambda = 800 nm, tau = 80 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

引用

收藏

页码：478 / 485

页数：8

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