Thermally stable InAlAs/InGaAs heterojunction FET with AlAs/InAs superlattice insertion layer

被引:7
作者
Fujihara, A
Onda, K
Nakayama, T
Miyamoto, H
Ando, Y
Wakejima, A
Mizuki, E
Kuzuhara, M
机构
[1] Kansai Electronics Res. Laboratories, NEC Corporation, Otsu, Shiga 520, 9-1
关键词
field effect transistors; semiconductor superlattices; thermal stability;
D O I
10.1049/el:19960645
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel InAlAs/InGaAs heterojunction FET (HJFET), with an AlAs/InAs superlattice inserted between an InAlAs Schottky layer and an InAlAs donor layer, is proposed. The developed device exhibited initial DC characteristics identical to those of the conventional lattice-matched HJFET and improved thermal stability owing to the inserted superlattice layer acting as a barrier against impurity diffusion.
引用
收藏
页码:1039 / 1041
页数:3
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