Low-voltage and high-gain pentacene inverters with plasma-enhanced atomic-layer-deposited gate dielectrics

被引:18
作者
Koo, Jae Bon [1 ]
Yun, Sun Jin [1 ]
Lim, Jung Wook [1 ]
Kim, Seong Hyun [1 ]
Ku, Chan Hoe [1 ]
Lim, Sang Chul [1 ]
Lee, Jung Hun [1 ]
Zyung, Taehyoung [1 ]
机构
[1] IT Convergence & Component Lab, Elect & Telecommun Res Inst, Taejon 305700, South Korea
关键词
D O I
10.1063/1.2234835
中图分类号
O59 [应用物理学];
学科分类号
摘要
The pentacene thin-film transistors with the plasma-enhanced atomic-layer-deposited 150 nm thick Al2O3 or 120 nm thick ZrO2 have been operated at gate voltages between -3 and 3 V. The inverter with a ZrO2 gate dielectric shows a gain of 49 and a full swing from supply voltage (V-dd) to 0 V, operating at input voltages (V-in) from 0 to -1 V and at V-dd of -1 V. The hysteresis observed in the voltage transfer characteristic of the inverter depends on the scan range of V-in applied to the driver transistor, regardless of the V-dd applied to the load transistor.
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页数:3
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