Modification of the outgassing rate of stainless steel surfaces by plasma immersion ion implantation

Plasma immersion ion implantation (PIII) was used to implant stainless steel samples to incorporate oxygen or nitrogen ions into the surface in a defined manner. The aim of this implantation was to create oxide or nitride barrier layers for the gas diffusion or to influence the number and behavior of adsorption sites. With the help of surface analytical methods (especially ESCA (Electron Spectroscopy for Chemical Analysis)) it was shown that oxygen or nitrogen was incorporated homogeneously below the outermost surface in a special depth interval. First measurements of the outgassing behavior of these plasma treated surfaces, caused by the creation of the implantation layer, are presented. Effects of the carbon removal of the outermost surface by the ion bombardment will be shown. Simple model conceptions were applied to describe the time dependence of the partial outgassing. (C) 1997 Elsevier Science S.A.