Solar-blind AlGaN photodiodes with very low cutoff wavelength

被引:170
作者
Walker, D [1 ]
Kumar, V [1 ]
Mi, K [1 ]
Sandvik, P [1 ]
Kung, P [1 ]
Zhang, XH [1 ]
Razeghi, M [1 ]
机构
[1] Northwestern Univ, Dept Elect & Comp Engn, Ctr Quantum Devices, Evanston, IL 60208 USA
关键词
D O I
10.1063/1.125768
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the fabrication and characterization of AlxGa1-xN photodiodes (x similar to 0.70) grown on sapphire by low-pressure metalorganic chemical vapor deposition. The peak responsivity for -5 V bias is 0.11 A/W at 232 nm, corresponding to an internal quantum efficiency greater than 90%. The device response drops four orders of magnitude by 275 nm and remains at low response for the entire near-ultraviolet and visible spectrum. Improvements were made to the device design including a semitransparent Ni/Au contact layer and a GaN:Mg cap layer, which dramatically increased device response by enhancing the carrier collection efficiency. (C) 2000 American Institute of Physics. [S0003-6951(00)01204-3].
引用
收藏
页码:403 / 405
页数:3
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