Kinetics of ion-induced ripple formation on Cu(001) surfaces

被引：53

作者：

Chan, WL ^{[1
]}

Pavenayotin, N ^{[1
]}

Chason, E ^{[1
]}

机构：

[1] Brown Univ, Div Engn, Providence, RI 02912 USA

来源：

PHYSICAL REVIEW B | 2004年 / 69卷 / 24期

关键词：

D O I：

10.1103/PhysRevB.69.245413

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have used low energy ion beams to spontaneously create patterns (sputter ripples) on Cu(001) surfaces. The evolution of the ripple amplitude and wavelength was measured in situ by using light scattering. At the temperatures (415-455 K) and ion fluxes (10(14)-10(15) ions cm(-2) s(-1)) studied, the ripple formation process is found to be similar to that described by the Bradley-Harper instability theory, i.e., the wavelength does not change appreciably with time, the orientation is determined by the ion beam direction and the amplitude increases exponentially during the early stages of growth. The flux dependence of the growth rate and wavelength is measured to determine the kinetics of defect production and annihilation on the surface.

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页码：245413 / 1

页数：6

相关论文

共 26 条

[1]

*ASM HDB COMM, 1985, MET HDB, V9, P48

[2] THEORY OF RIPPLE TOPOGRAPHY INDUCED BY ION-BOMBARDMENT [J].

BRADLEY, RM ;

HARPER, JME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2390-2395

[3] ROUGHENING INSTABILITY AND EVOLUTION OF THE GE(001) SURFACE DURING ION SPUTTERING [J].

CHASON, E ;

MAYER, TM ;

KELLERMAN, BK ;

MCILROY, DT ;

HOWARD, AJ .

PHYSICAL REVIEW LETTERS, 1994, 72 (19) :3040-3043

[4] Spectroscopic light scattering for real-time measurements of thin film and surface evolution [J].

Chason, E ;

Sinclair, MB ;

Floro, JA ;

Hunter, JA ;

Hwang, RQ .

APPLIED PHYSICS LETTERS, 1998, 72 (25) :3276-3278

[5] Dynamics of pattern formation during low-energy ion bombardment of Si(001) [J].

Chason, E ;

Erlebacher, J ;

Aziz, MJ ;

Floro, JA ;

Sinclair, MB .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 178 :55-61

[6]

Costantini G, 2001, J PHYS-CONDENS MAT, V13, P5875, DOI 10.1088/0953-8984/13/26/303

[7] DYNAMIC SCALING OF ION-SPUTTERED SURFACES [J].

CUERNO, R ;

BARABASI, AL .

PHYSICAL REVIEW LETTERS, 1995, 74 (23) :4746-4749

[8] THEORY OF LIGHT-SCATTERING FROM A ROUGH-SURFACE WITH AN INHOMOGENEOUS DIELECTRIC PERMITTIVITY [J].

ELSON, JM .

PHYSICAL REVIEW B, 1984, 30 (10) :5460-5480

[9] Spontaneous pattern formation on ion bombarded Si(001) [J].

Erlebacher, J ;

Aziz, MJ ;

Chason, E ;

Sinclair, MB ;

Floro, JA .

PHYSICAL REVIEW LETTERS, 1999, 82 (11) :2330-2333

[10] Nonlinear amplitude evolution during spontaneous patterning of ion-bombarded Si(001) [J].

Erlebacher, J ;

Aziz, MJ ;

Chason, E ;

Sinclair, MB ;

Floro, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2000, 18 (01) :115-120