共 17 条
All solution-processed high-resolution bottom-contact transparent metal-oxide thin film transistors
被引:55
作者:

Park, Sung Kyu
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Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea

Kim, Yong-Hoon
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Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea

Han, Jeong-In
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Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea
机构:
[1] Korea Elect Technol Inst, Semicond & Informat Display Res Div, Gyunggi Do, South Korea
关键词:
SILICON;
D O I:
10.1088/0022-3727/42/12/125102
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
We report all solution-processed high-resolution bottom-contact indium-gallium-zinc-oxide (IGZO) thin film transistors (TFTs) using a simple surface patterning and dip-casting process. High-resolution nanoparticulate Ag source/drain electrodes and a sol-gel processed IGZO semiconductor were deposited by a simple dip-casting along with a photoresist-free, non-relief-pattern lithographic process. The deposited Ag and IGZO solution can be steered into the desired hydrophilic areas by a low surface energy self-assembled monolayer, resulting in source/drain electrodes and semiconducting layer, respectively. The all solution-processed bottom-contact IGZO TFTs including a channel length of 10 mu m typically showed a mobility range 0.05-0.2 cm(2) V-1 s(-1) with an on/off ratio of more than 10(6).
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