The preparation of piezoceramic-polymer thick films and their application as micromechanical actuators

被引：25

作者：

Clegg, WW

Jenkins, DFL

Cunningham, MJ

机构：

[1] UNIV MANCHESTER,MANCHESTER SCH ENGN,DIV ELECT ENGN,MANCHESTER M13 9PL,LANCS,ENGLAND

[2] UNIV PLYMOUTH,SCH ELECT COMMUN & ELECT ENGN,PLYMOUTH PL4 8AA,DEVON,ENGLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 58卷 / 03期

基金：

英国工程与自然科学研究理事会;

关键词：

micromechanical actuators; piezoceramics; polymers; thick films;

D O I：

10.1016/S0924-4247(96)01431-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

There is currently considerable interest in the development of piezoelectric materials with properties that cannot at present be attained with single-phase materials. Composite piezoelectric thick films have been prepared and characterized. These films, deposited directly onto metallized glass cantilevers, have been shown to be effective as micro-actuators.

引用

页码：173 / 177

页数：5

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