Microstructural evolution of gold-aluminum wire-bonds

被引:31
作者
Karpel, Adi
Gur, Giyora
Atzmon, Ziv
Kaplan, Wayne D. [1 ]
机构
[1] Technion Israel Inst Technol, Dept Mat Engn, IL-32000 Haifa, Israel
[2] Kulicke & Soffa Bonding Tools, IL-20692 Yokneam Elite, Israel
关键词
D O I
10.1007/s10853-007-1593-y
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The purpose of this study is to understand the morphological changes that occur during annealing of Al-Au wire-bonds, by analyzing the interface region of annealed model wire-bonded samples between 5N (99.999%) Au wires and Al pads. Due to the small length scale of the intermetallic region at the interface of the bond, the analysis was done using scanning/transmission electron microscopy combined with energy dispersive spectroscopy. Samples were prepared using a dual-beam focused ion beam system. Microstructural characterization showed that during annealing, a Au-rich intermetallic region was formed under the bond and at the periphery of the bond. Two types of failures occurred during annealing: crack formation at the bond periphery due to an increase in volume during intermetallic growth and the formation of stresses; and oxidation of the AlAu4 phase adjacent to the Au ball, which resulted in the formation of continuous cracks between the Au ball and the intermetallic region. The characteristic void-line found inside the intermetallic region played no part in failure that occurred during exposure to elevated temperatures.
引用
收藏
页码:2347 / 2357
页数:11
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