Ablation of PMMA, PTFE, and Si by soft x-rays emitted from hot dense plasma

被引：5

作者：

Juha, L ^{[1
]}

Krása, J ^{[1
]}

Präg, AR ^{[1
]}

Cejnarová, A ^{[1
]}

Chvostová, D ^{[1
]}

Kravárik, J ^{[1
]}

Kubes, P ^{[1
]}

Bakshaev, YL ^{[1
]}

Chernenko, AS ^{[1
]}

Korolev, VD ^{[1
]}

Tumanov, VI ^{[1
]}

Ivanov, MI ^{[1
]}

Scholz, M ^{[1
]}

Ryc, L ^{[1
]}

Tomaszewski, K ^{[1
]}

Viskup, R ^{[1
]}

Boody, FP ^{[1
]}

Kodymová, J ^{[1
]}

机构：

[1] Acad Sci Czech Republ, Inst Phys, Prague 18221 8, Czech Republic

来源：

HIGH-POWER LASER ABLATION IV, PTS 1 AND 2 | 2002年 / 4760卷

关键词：

ablation; polymers; silicon; soft x-rays; Z-pinch; plasma focus; laser-produced plasma;

D O I：

10.1117/12.482076

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The efficiency and ablation threshold of polymethylmethacrylate (PMMA), polytetrafluoroethylene (PTFE), and monocrystalline silicon by single pulses of soft x-rays emitted from Z-pinch, plasma-focus, and laser-produced plasmas were investigated. The Z-pinch was driven by the S-300 pulsed-power machine (Kurchatov Institute, Moscow) and the plasma focus was realized in the PF-1000 machine (Institute of Plasma Physics and Laser Microfusion, Warsaw). Higher temperature plasma than with the discharge plasmas was obtained by focusing the near-infrared beam from the PALS high-power iodine laser system (Czech Academy of Sciences, Prague) on the surface of a metallic slab target. The role of nonthermal processes in x-ray ablation was evaluated. Possible ways to use x-ray ablation for micromachining are discussed.

引用

页码：1098 / 1105

页数：8

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