Submicrometer-resolution three-dimensional imaging with hard x-ray imaging microtomography

被引：50

作者：

Takeuchi, A ^{[1
]}

Uesugi, K ^{[1
]}

Takano, H ^{[1
]}

Suzuki, Y ^{[1
]}

机构：

[1] Japan Synchrotron Radiat Res Inst, SPring8, Mikazuki, Hyogo 6795198, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2002年 / 73卷 / 12期

关键词：

D O I：

10.1063/1.1515385

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An x-ray microtomography method combined with hard x-ray imaging microscopy was developed that has a potential spatial resolution of the order of 10-100 nm. The system consists of a high-brilliance undulator source of SPring-8, a beam diffuser plate to reduce the coherence of the illumination, a high-precision rotating sample stage, a Fresnel zone plate objective, and a high-resolution x-ray imaging detector. The three-dimensional images of several samples were observed and successfully reconstructed with a pitch pattern of 0.6 mum. (C) 2002 American Institute of Physics.

引用

页码：4246 / 4249

页数：4

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