共 32 条
[1]
Step and flash imprint lithography: Template surface treatment and defect analysis
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:3572-3577
[3]
IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS
[J].
APPLIED PHYSICS LETTERS,
1995, 67 (21)
:3114-3116
[8]
Gonsalves KE, 2001, ADV MATER, V13, P703, DOI 10.1002/1521-4095(200105)13:10<703::AID-ADMA703>3.0.CO
[9]
2-A