MEMS technology in analytical chemistry

被引：11

作者：

Deisingh, AK ^{[1
]}

机构：

[1] McMaster Univ, Dept Chem, Hamilton, ON L8S 4M1, Canada

来源：

ANALYST | 2003年 / 128卷 / 01期

关键词：

D O I：

10.1039/b211229a

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Microelectromechanical systems promise to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, moving us closer towards the realization of complete systems-on-a-chip. Anil Deisingh talks us through the basics of MEMS technology and the growing role of these new "micromachines" in analytical chemistry applications.

引用

页码：9 / 11

页数：3

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