Epitaxy and strain in the growth of GaN on AlN: A polarized x-ray absorption spectroscopy study

被引:18
作者
d'Acapito, F
Boscherini, F
Mobilio, S
Rizzi, A
Lantier, R
机构
[1] European Synchrotron Radiat Facil, Operat Grp Grenoble, Ist Nazl Fis Mat, F-38043 Grenoble, France
[2] Univ Bologna, Dipartmento Fis, I-40127 Bologna, Italy
[3] Univ Bologna, Ist Nazl Fis Mat, I-40127 Bologna, Italy
[4] Univ Roma Tre, Dipartimento Fis, I-00146 Rome, Italy
[5] Univ Modena & Reggio Emilia, Dipartimento Fis, I-41100 Modena, Italy
[6] Univ Modena & Reggio Emilia, Ist Nazl Fis Mat, I-41100 Modena, Italy
[7] Ist Nazl Fis Nucl, Lab Nazl Frascati, I-00044 Frascati, Italy
[8] Forschungszentrum Julich, ISG, D-52425 Julich, Germany
来源
PHYSICAL REVIEW B | 2002年 / 66卷 / 20期
关键词
D O I
10.1103/PhysRevB.66.205411
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a study of the local structure of 7-8 nm thick GaN epilayers deposited on AlN by molecular beam epitaxy at temperatures ranging between 620 and 790 degreesC by x-ray absorption spectroscopy, exploiting the polarization dependence of the technique. Both the near-edge and extended spectra suggest that atomic intermixing between GaN and AlN takes place at most for one monolayer. An interpretation of the near-edge spectra of wurtzite GaN and of the variation with the sample orientation in the framework of multiple scattering theory is provided. Values of the in-plane and out-of-plane strain due to heteroepitaxial growth are obtained from the interatomic distances in the second coordination shell around Ga; we compare the obtained values to literature values of the elastic constants, finding good agreement with most of them.
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页码:1 / 7
页数:7
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