Effects of hydrogen on Si nanoparticles formed by pulsed laser ablation

被引：20

作者：

Inada, M

Nakagawa, H

Umeza, I

Sugimura, A

机构：

[1] Konan Univ, High Technol Res Ctr, Higashinada Ku, Kobe, Hyogo 6588501, Japan

[2] Konan Univ, Dept Phys, Higashinada Ku, Kobe, Hyogo 6588501, Japan

来源：

APPLIED SURFACE SCIENCE | 2002年 / 197卷

关键词：

reactive-pulsed laser ablation; silicon nanoparticle; hydrogenation;

D O I：

10.1016/S0169-4332(02)00437-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We examined reactive pulsed laser ablation of silicon target in hydrogen atmosphere to form hydrogenated silicon nanoparticles. A correlation between hydrogen pressure and sample properties or structure was investigated by varying hydrogen pressure from 5 to 532 Pa. We could form hydrogenated silicon nanoparticles above 30 Pa. The size of nanoparticles could be changed by controlling hydrogen pressure. The bonding configuration of silicon and hydrogen changes between 20 and 30 Pa, which is demarcation of the sample structure from film-like to nanoparticles. These results imply reactive laser ablation has a possibility to produce a well-designed sample both size and bonding configuration. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：666 / 669

页数：4

共 6 条

[1]

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