Observation of the Si(111) 7x7 atomic structure using non-contact scanning nonlinear dielectric microscopy

被引:27
作者
Hirose, Ryusuke [1 ]
Ohara, Koya [1 ]
Cho, Yasuo [1 ]
机构
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
D O I
10.1088/0957-4484/18/8/084014
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Non- contact scanning nonlinear dielectric microscopy ( NC- SNDM) operated under ultra high vacuum ( UHV) conditions was developed. This microscopy enables the simultaneous measurement of the topography and dielectric properties of a specimen. For electrically conductive materials, the tunnelling current is also measurable. The atomic structure of Si( 111) 7 x 7 was successfully resolved using this new SNDM technique. This is the first report on the achievement of atomic resolution in capacitance measurements.
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页数:5
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