A statistical model for SILC in flash memories

被引:53
作者
Ielmini, D [1 ]
Spinelli, AS
Lacaita, AL
Modelli, A
机构
[1] Politecn Milan, Dipartimento Elettr & Informat, I-20133 Milan, Italy
[2] Univ Insubria, Dipartimento Sci Chim Fis & Matemat, I-22100 Como, Italy
[3] Univ Insubria, Ist Nazl Fis Mat, I-22100 Como, Italy
[4] STMicroelect, Cent R&D, I-20041 Agrate Brianza, Italy
关键词
EPROM; leakage currents; reliability modeling;
D O I
10.1109/TED.2002.804730
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Reliability of Flash memories is strongly limited by the stress-induced leakage current (SILC), which leads to accelerated charge-loss phenomena in few anomalous cells. Estimating the reliability of large Flash arrays requires that physically-based models for the statistical distribution of SILC are developed. In this paper, we show a physical model for the leakage mechanism in thin oxides, which is able to explain the anomalous leakage-conduction in tail cells. The physical model is then used for a quantitative evaluation of the SILC distribution in large Flash arrays. The new model can reproduce the statistics of SILC for a wide range of tunnel-oxide thickness, and can provide a straightforward estimation of reliability for large Flash arrays.
引用
收藏
页码:1955 / 1961
页数:7
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