Equivalent cell approach for extraction of the SILC distribution in flash EEPROM cells

被引:22
作者
Ielmini, D [1 ]
Spinelli, AS
Lacaita, AL
Modelli, A
机构
[1] Politecn Milan, Dipartimento Elettron & Informat, I-20133 Milan, Italy
[2] Univ Insubria, Dipartimento Sci Chim Fis & Matemat, I-22100 Como, Italy
[3] Ist Nazl Fis Mat, I-22100 Como, Italy
[4] STMicroelectronics, Cent R&D, I-20041 Agrate Brianza, Italy
关键词
electrically erasable programmable read only; memory; leakage currents; reliability estimation;
D O I
10.1109/55.974806
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new method for characterizing the distribution of the stress-induced leakage current (SILC) in Flash memories is presented. The statistics of the leakage parameters is extracted directly from the time dependence of the threshold voltage distributions obtained in a single gate-stress experiment, without any need for tracking the behavior of the individual cells. The new technique can be used for fast evaluation and reliability projections, as well as providing a tool for statistical investigation on the oxide leakage mechanisms.
引用
收藏
页码:40 / 42
页数:3
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