Angle resolved velocity distributions of sputtered medium Z atoms

被引：2

作者：

Goehlich, A

Niemoller, N

Dobele, HF

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1997年 / 241卷

关键词：

physical erosion; impurity source;

D O I：

10.1016/S0022-3115(97)80213-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Measurements of angle resolved velocity distributions of sputtered atoms by the laser Doppler shift method are reported. The influence of the emission angle (as well as the angle of incidence) on the velocity distribution is studied by directing the laser beam along selected emission angles and scanning the laser wavelength over the Doppler broadened resonance. The new version of our sputtering apparatus allows us to study nine different ejection angles. We report on first measurements with aluminum and titanium atoms.

引用

页码：1160 / 1163

页数：4

共 7 条

[1]

ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1

[2]

BAY HL, 1987, NUCL INSTRUM METH B, V18, P430

[3] VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE [J].