Local piezoelectric response in bismuth-based ferroelectric thin films investigated by scanning force microscopy

被引：12

作者：

Fu, DS ^{[1
]}

Suzuki, K ^{[1
]}

Kato, K ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2002年 / 41卷 / 10A期

关键词：

ferroelectric; piezoelectric; scanning force microscopy; bismuth-based ferroelectric thin film;

D O I：

10.1143/JJAP.41.L1103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Scanning force microscopy (SFM) has been used to probe the local polarization state and piezoelectric properties of ferroelectric films. The conductive SFM tip was employed as a movable top electrode to detect the piezoresponse in the film induced by an ac voltage, Our measurements reveal a spatial dependence of the piezoelectric properties of individual grains of virgin ferroelectric films. A maximum effective piezoelectric coefficient of 5.5 pm/V has been detected in the lead-free CaBi(14)Ti(14)Oj(15) film.

引用

页码：L1103 / L1105

页数：3

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