High-efficiency 352 nm quaternary InAlGaN-based ultraviolet light-emitting diodes grown on GaN substrates

被引:42
作者
Hirayama, H
Akita, K
Kyono, T
Nakamura, T
Ishibashi, K
机构
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[2] Sumitomo Elect Ind Ltd, Semicond Res & Dev Labs, Itami, Hyogo 6640016, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2004年 / 43卷 / 10A期
关键词
quaternary InAlGaN; GaN substrate; UV-LEDs; threading dislocation density; MOCVD;
D O I
10.1143/JJAP.43.L1241
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrated high-efficiency ultraviolet (UV) light-emitting diodes (LEDs) with an emission wavelength of 352 nm using a quaternary InAlGaN multiple-quantum-well (MQW) emitting region. GaN substrates were used in order to eliminate the effects of threading dislocations. Emission fluctuation due to In segregation was clearly observed even in a dislocation-free area by a cathode luminescence (CL) image of a quaternary InAlGaN MQW, which is considered to contribute to the achievement of a high-efficiency UV emission. The maximum UV output power obtained was as high as 7.4 mW under room temperature (RT) CW operation. The maximum external quantum efficiency (EQE) was 1.1% with an injection current of 50 mA, which is the highest EQE ever obtained for 350-nm-band UV LEDs with a top-emission geometry.
引用
收藏
页码:L1241 / L1243
页数:3
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