Development of silver-based multilayer coating electrodes with low resistance for use in flat panel displays

被引：44

作者：

Aoshima, Y ^{[1
]}

Miyazaki, M ^{[1
]}

Sato, K ^{[1
]}

Akao, Y ^{[1
]}

Takaki, S ^{[1
]}

Adachi, K ^{[1
]}

机构：

[1] Asahi Glass Co Ltd, Res Ctr, Kanagawa Ku, Yokohama, Kanagawa 2210863, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 08期

关键词：

silver; indium oxide; zinc oxide; tin-doped indium oxide; multilayer coatings; low resistance; high durability; patterning; flat panel displays;

D O I：

10.1143/JJAP.39.4884

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Multilayer coatings consisting of thin silver layers sandwiched between layers of transparent conducting metal oxides were investigated from the view-point of low-resistance electrodes for use in flat panel displays. Optimization of the multilayer coatings resulted in a five-layer coating composed of indium and zinc oxide composite material (IZO) and silver containing 1 wt% of palladium (Ag-Pd). The coatings had satisfactory properties of low resistance, high transmittance, high moisture and alkali resistance, and good patterning.

引用

页码：4884 / 4889

页数：6

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