Development of silver-based multilayer coating electrodes with low resistance for use in flat panel displays

被引：44

作者：

Aoshima, Y ^{[1
]}

Miyazaki, M ^{[1
]}

Sato, K ^{[1
]}

Akao, Y ^{[1
]}

Takaki, S ^{[1
]}

Adachi, K ^{[1
]}

机构：

[1] Asahi Glass Co Ltd, Res Ctr, Kanagawa Ku, Yokohama, Kanagawa 2210863, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 08期

关键词：

silver; indium oxide; zinc oxide; tin-doped indium oxide; multilayer coatings; low resistance; high durability; patterning; flat panel displays;

D O I：

10.1143/JJAP.39.4884

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Multilayer coatings consisting of thin silver layers sandwiched between layers of transparent conducting metal oxides were investigated from the view-point of low-resistance electrodes for use in flat panel displays. Optimization of the multilayer coatings resulted in a five-layer coating composed of indium and zinc oxide composite material (IZO) and silver containing 1 wt% of palladium (Ag-Pd). The coatings had satisfactory properties of low resistance, high transmittance, high moisture and alkali resistance, and good patterning.

引用

页码：4884 / 4889

页数：6

共 19 条

[11] DURABILITY OF AG BASED LOW-EMISSIVITY COATINGS [J].

NADEL, SJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2709-2713

[12] ELECTRICAL AND OPTICAL-PROPERTIES OF IN2O3-SN FILMS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].

NATH, P ;

BUNSHAH, RF ;

BASOL, BM ;

STAFFSUD, OM .

THIN SOLID FILMS, 1980, 72 (03) :463-468

[13] Structure and properties of tin-doped indium oxide thin films prepared by reactive electron-beam evaporation with a zone-confining arrangement [J].

Rauf, IA .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) :4057-4065

[14] A NOVEL METHOD FOR PREPARING THIN-FILMS WITH SELECTIVE DOPING IN A SINGLE EVAPORATION STEP [J].

RAUF, IA .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1993, 12 (24) :1902-1905

[15] PROPERTIES OF TIN DOPED INDIUM OXIDE THIN-FILMS PREPARED BY MAGNETRON SPUTTERING [J].

RAY, S ;

BANERJEE, R ;

BASU, N ;

BATABYAL, AK ;

BARUA, AK .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3497-3501

[16] ELECTRICAL AND STRUCTURAL-PROPERTIES OF LOW RESISTIVITY TIN-DOPED INDIUM OXIDE-FILMS [J].

SHIGESATO, Y ;

TAKAKI, S ;

HARANOH, T .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) :3356-3364

[17] PROGRESS IN THE DEVELOPMENT OF A DURABLE SILVER-BASED HIGH-REFLECTANCE COATING FOR ASTRONOMICAL TELESCOPES [J].

SONG, DY ;

SPRAGUE, RW ;

MACLEOD, HA ;

JACOBSON, MR .

APPLIED OPTICS, 1985, 24 (08) :1164-1170

[18] The tension of metallic films deposited by electrolysis [J].

Stoney, GG .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1909, 82 (553) :172-175

[19] PROPERTIES OF HIGHLY CONDUCTING ITO FILMS PREPARED BY ION PLATING [J].

TAKAKI, S ;

MATSUMOTO, K ;

SUZUKI, K .

APPLIED SURFACE SCIENCE, 1988, 33-4 :919-925

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