New optical probes using InP-based cantilevers

被引：4

作者：

Castagne, M ^{[1
]}

Belier, B

Gall, P

Benfedda, M

Seassal, C

Spisser, A

Leclerc, JL

Viktorovich, P

机构：

[1] Univ Montpellier 2, Ctr Elect & Microoptoelect Montpellier, LINCS, F-34095 Montpellier 5, France

[2] Ecole Cent Lyon, LEAME, F-69131 Ecully, France

来源：

ULTRAMICROSCOPY | 1998年 / 71卷 / 1-4期

关键词：

microfabrication; cantilevers; integrated photodetector; near field optics;

D O I：

10.1016/S0304-3991(97)00113-7

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Cantilevers made of III-V ternary compounds have been especially designed to obtain a spring constant in the classical range of 0.1 N/m. They are successfully fabricated by epitaxial growth techniques on InP substrate and wet etching. The layer structure is intended to further contribute in a microoptoelectronic device. The cantilever is afterwards provided with a carbon supertip which is expected to play simultaneously both roles of an atomic force sensor and an optical near-field converter. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：81 / 84

页数：4

共 9 条

[1] NEW SCANNING TUNNELING MICROSCOPY TIP FOR MEASURING SURFACE-TOPOGRAPHY [J].