Nano electromechanical sensors based on carbon nanotubes

被引：211

作者：

Hierold, Christofer ^{[1
]}

Jungen, Alain ^{[1
]}

Stampfer, Christoph ^{[1
]}

Helbling, Thomas ^{[1
]}

机构：

[1] ETH, Dept Mech & Proc Engn, CH-8092 Zurich, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 136卷 / 01期

关键词：

NEMS; MEMS; transducers; carbon nanotubes; process integration; nanotechnology;

D O I：

10.1016/j.sna.2007.02.007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sensors are key components in an overwhelming wealth of systems for industrial and consumer applications. Further system miniaturization will demand for continuous down-scaling of sensor functions in such systems most likely towards nanoscale. Then new sensor device concepts will emerge to improve performance, e.g. sensitivity, or to utilize unique functional properties of nanoscale structures. This paper presents concepts and demonstrators of nano electromechanical sensors based on carbon nanotubes (CNTs). First, different transducer concepts based on the unique electrical, mechanical and electromechanical properties of single-walled carbon nanotubes (SWNTs) are addressed and discussed. Second, fabrication techniques and methods for the integration of SWNTs in micro or nanosystems are presented. Finally, demonstrators of suspended SWNT-based cantilever structures and a membrane-based nanotube pressure sensor are introduced and evaluated. Electromechanical measurements on these test devices prove SWNTs as exceptional piezoresistive electromechanical transducers with gauge factors far above the values of state-of-the-art strain gauges. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：51 / 61

页数：11

共 83 条

[71]

STAMPFER C, 2005, P 13 INT C SOL STAT, P2103

[72] Fabrication of discrete nanoscaled force sensors based on single-walled carbon nanotubes [J].

Stampfer, Christoph ;

Jungen, Alain ;

Hierold, Christofer .

IEEE SENSORS JOURNAL, 2006, 6 (03) :613-617

[73] Energy conversion efficiency in nanotube optoelectronics [J].

Stewart, DA ;

Léonard, F .

NANO LETTERS, 2005, 5 (02) :219-222

[74] Room-temperature chemical vapor deposition and mass detection on a heated atomic force microscope cantilever [J].

Sunden, EO ;

Wright, TL ;

Lee, J ;

King, WP ;

Graham, S .

APPLIED PHYSICS LETTERS, 2006, 88 (03) :1-3

[75] Room-temperature transistor based on a single carbon nanotube [J].

Tans, SJ ;

Verschueren, ARM ;

Dekker, C .

NATURE, 1998, 393 (6680) :49-52

[76] Characterization of platinum films deposited by focused ion beam-assisted chemical vapor deposition [J].

Telari, KA ;

Rogers, BR ;

Fang, H ;

Shen, L ;

Weller, RA ;

Braski, DN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (02) :590-595

[77] Reversible electromechanical characteristics of carbon nanotubes under local-probe manipulation [J].

Tombler, TW ;

Zhou, CW ;

Alexseyev, L ;

Kong, J ;

Dai, HJ ;

Lei, L ;

Jayanthi, CS ;

Tang, MJ ;

Wu, SY .

NATURE, 2000, 405 (6788) :769-772

[78] Electromechanical effects in carbon nanotubes: Ab initio and analytical tight-binding calculations [J].

Verissimo-Alves, M ;

Koiller, B ;

Chacham, H ;

Capaz, RB .

PHYSICAL REVIEW B, 2003, 67 (16)

[79] Single-electron-phonon interaction in a suspended quantum dot phonon cavity [J].

Weig, EM ;

Blick, RH ;

Brandes, T ;

Kirschbaum, J ;

Wegscheider, W ;

Bichler, M ;

Kotthaus, JP .

PHYSICAL REVIEW LETTERS, 2004, 92 (04) :4

[80] Fabrication of nanometer-scale mechanical devices incorporating individual multiwalled carbon nanotubes as torsional springs [J].

Williams, PA ;

Papadakis, SJ ;

Patel, AM ;

Falvo, MR ;

Washburn, S ;

Superfine, R .

APPLIED PHYSICS LETTERS, 2003, 82 (05) :805-807

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