Laterally-resolved study of the Au/SiNx/GaAs(100) interface

被引:6
作者
Almeida, J [1 ]
Margaritondo, G
Coluzza, C
Davy, S
Spajer, M
Courjon, D
机构
[1] Ecole Polytech Fed Lausanne, Inst Phys Appl, CH-1015 Lausanne, Switzerland
[2] Univ Roma La Sapienza, Dipartimento Fis, INFM, I-00185 Rome, Italy
[3] Univ Franche Comte, Lab Opt, F-25030 Besancon, France
关键词
D O I
10.1016/S0169-4332(97)00411-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report a microscopic study of the Au/5 Angstrom SiNx/GaAs Schottky barrier based on scanning near-field optical microscopy. Photocurrent yield microimages taken at different photon energies reveal non-topographic features. Taking into account their dependence on photon energy and bias, such features are consistent with lateral variations of the local density of states related to defects. The results, therefore, confirm that lateral variations must be considered when analyzing semiconductor interfaces and of the corresponding devices. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:6 / 10
页数:5
相关论文
共 12 条
  • [1] Novel spectromicroscopy: Pt-GaP studies by spatially resolved internal photoemission with near-field optics
    Almeida, J
    Orto, TD
    Coluzza, C
    Margaritondo, G
    Bergossi, O
    Spajer, M
    Courjon, D
    [J]. APPLIED PHYSICS LETTERS, 1996, 69 (16) : 2361 - 2363
  • [2] Au/GaAs(100) interface Schottky barrier modification by a silicon nitride intralayer
    Almeida, J
    Coluzza, C
    dellOrto, T
    Margaritondo, G
    Terrasi, A
    Ivanco, J
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 81 (01) : 292 - 296
  • [3] BERGOSSI O, 1994, P SOC PHOTO-OPT INS, V2341, P239, DOI 10.1117/12.195546
  • [4] NEAR-FIELD OPTICS - MICROSCOPY, SPECTROSCOPY, AND SURFACE MODIFICATION BEYOND THE DIFFRACTION LIMIT
    BETZIG, E
    TRAUTMAN, JK
    [J]. SCIENCE, 1992, 257 (5067) : 189 - 195
  • [5] COMBINED SHEAR FORCE AND NEAR-FIELD SCANNING OPTICAL MICROSCOPY
    BETZIG, E
    FINN, PL
    WEINER, JS
    [J]. APPLIED PHYSICS LETTERS, 1992, 60 (20) : 2484 - 2486
  • [6] Brillson LJ, 1992, HDB SEMICONDUCTORS, V1, P281
  • [7] SCHOTTKY-BARRIER HEIGHT CONTROL AT EPITAXIAL NIAL/GAAS(001) INTERFACES BY MEANS OF VARIABLE BAND-GAP INTERLAYERS
    CHAMBERS, SA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 860 - 868
  • [8] INTERNALLY DETECTED ELECTRON PHOTOEXCITATION SPECTROSCOPY ON HETEROSTRUCTURES
    COLUZZA, C
    MARGARITONDO, G
    NEGLIA, A
    CARLUCCIO, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 744 - 748
  • [9] BARRIER HEIGHT VARIATION IN AL/GAAS SCHOTTKY DIODES WITH A THIN SILICON INTERFACIAL LAYER
    COSTA, JC
    WILLIAMSON, F
    MILLER, TJ
    BEYZAVI, K
    NATHAN, MI
    MUI, DSL
    STRITE, S
    MORKOC, H
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (04) : 382 - 384
  • [10] DELLORTO T, 1994, APPL PHYS LETT, V64, P16