Vibrational analysis of oxygen-plasma treated indium tin oxide

被引：17

作者：

He, P

Wang, SD

Wong, WK

Cheng, LF

Lee, CS

Lee, ST ^{[1
]}

Liu, SY

机构：

[1] City Univ Hong Kong, COSDAF, Hong Kong, Hong Kong, Peoples R China

[2] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China

[3] Zhejiang Univ, Dept Phys, Hangzhou 310027, Peoples R China

[4] Jilin Univ, State Key Lab Integrated Optoelect, Changchun 130023, Peoples R China

来源：

CHEMICAL PHYSICS LETTERS | 2003年 / 370卷 / 5-6期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1016/S0009-2614(03)00177-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the 'as-received' ITO was the loss peaks associated with the CHx group. Oxygen-plasma treatment of ITO led to the disappearance of the CHx loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CHx group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：795 / 798

页数：4

共 12 条

[1] Work function changes and surface chemistry of oxygen, hydrogen, and carbon on indium tin oxide [J].