Thick-film PZT-silicon micromechanical resonator

被引：7

作者：

Beeby, SP ^{[1
]}

White, NM ^{[1
]}

机构：

[1] Univ Southampton, Dept Elect & Comp Sci, USITT, Southampton SO17 1BJ, Hants, England

来源：

ELECTRONICS LETTERS | 2000年 / 36卷 / 19期

关键词：

D O I：

10.1049/el:20001139

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micromechanical silicon beam resonator in which the vibrations are driven and detected by thick-film printed piezoelectric elements is presented. Standard micromachining and thick-film processes have been successfully combined to fabricate the device. The resonator, 2mm long and 0.52mm wide, has a fundamental mode in air at 56.5 kHz with a Q-factor of 70.

引用

页码：1661 / 1662

页数：2

共 6 条

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Beeby, SP ;

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Beeby, SP ;

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[4]

Thomson WT, 1988, Theory of Vibration with Applications

[5] SILICON RESONATOR SENSORS - INTERROGATION TECHNIQUES AND CHARACTERISTICS [J].

TUDOR, MJ ;

ANDRES, MV ;

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IEE PROCEEDINGS-D CONTROL THEORY AND APPLICATIONS, 1988, 135 (05) :364-368

[6]

Tudor MJ, 1997, SENSOR MATER, V9, P457

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