Review of the thermal conductivity of thin films

The thermal conductivity of thin films (0.01-100 mu m) governs the heat transfer characteristics and affects the performance and reliability of the microelectronic devices in which they are used, To measure the thermal conductivity of these films, several different steady-state and transient techniques have been developed, some involving the use of lasers. New methods of thin-film deposition have also been developed, This paper reviews experimental and analytical techniques and the thermal conductivity results obtained. It is shown that that the results obtained by these different measurement techniques and deposition methods vary significantly, This emphasizes the. importance of measuring the thermal conductivity of thin-film materials that closely resemble those being used in specific applications.