Simulated threshold voltage adjustment and drain current enhancement in novel striped-gate nondoped-channel fully depleted SOI-MOSFETs

被引:2
作者
Koh, R [1 ]
机构
[1] NEC Corp Ltd, Silicon Syst Res Labs, Sagamihara, Kanagawa 2291198, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 4B期
关键词
SOI; MOS; FET; threshold voltage; mobility; metal gate;
D O I
10.1143/JJAP.39.2229
中图分类号
O59 [应用物理学];
学科分类号
摘要
To enhance the performance of metal-oxide-silicon field-effect-transistors (MOSFETs), a new device having a Silicon-on-insulator (SOI) structure, called a striped-gate SOI-MOSFET, is proposed and its electrical characteristics are estimated by device simulation. The threshold voltage of this device is controlled by changing the length of a metal layer interposed in the gate electrode. A set of systematic device simulations reveals a type of two-dimensional effect in the gate electric field provides a continuous threshold voltage control for a non-doped channel SOI-MOSFET, and that the suppression of the channel doping provides a large drain current. A circuit simulation on a 2-input complementary-MOS (CMOS) NAND gate chain comprising the devices shows that the operation speed is enhanced by 46% compared with that of bulk MOSFETs, due to the device's large drain current and small parasitic capacitance.
引用
收藏
页码:2229 / 2235
页数:7
相关论文
共 17 条
[1]   DESIGN CONSIDERATIONS FOR THIN-FILM SOI CMOS DEVICE STRUCTURES [J].
AOKI, T ;
TOMIZAWA, M ;
YOSHII, A .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (09) :1725-1731
[2]  
AOYAMA K, 1998, TECH REP IEICE, V98, P65
[3]  
CHEN J, 1992, IEDM, P35
[4]  
HWANG JM, 1992, IEDM, P345
[5]  
HWANG JM, 1992, P IEEE INT SOI C, P148
[6]  
Kado Y, 1997, IEICE T ELECTRON, VE80C, P443
[7]   Capacitance network model of the short channel effect for 0.1 mu m fully depleted SOI MOSFET [J].
Koh, R ;
Kato, H ;
Matsumoto, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B) :996-1000
[8]   AN INVESTIGATION ON THE SHORT-CHANNEL EFFECT FOR O.1-MU-M FULLY DEPLETED SOIMOSFET USING EQUIVALENT ONE-DIMENSIONAL MODEL [J].
KOH, R ;
KATO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (2B) :836-841
[9]  
Nishimura T., 1991, International Electron Devices Meeting 1991. Technical Digest (Cat. No.91CH3075-9), P109, DOI 10.1109/IEDM.1991.235412
[10]   3-DIMENSIONAL TABLE-LOOK-UP MOSFET MODEL FOR PRECISE CIRCUIT SIMULATION [J].
SHIMA, T ;
SUGAWARA, T ;
MORIYAMA, S ;
YAMADA, H .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1982, 17 (03) :449-454