共 15 条
[1]
BECK ES, 2000, Patent No. 638586
[2]
BECK ES, Patent No. 1180553
[8]
Ultrathin diffusion barriers/liners for gigascale copper metallization
[J].
ANNUAL REVIEW OF MATERIALS SCIENCE,
2000, 30
:363-385
[9]
Growth of silicon oxide on hydrogenated silicon during lithography with an atomic force microscope
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (06)
:2952-2956