Role of surface chemistry in semiconductor thin film processing

被引：61

作者：

Ekerdt, JG

Sun, YM

Szabo, A

Szulczewski, GJ

White, JM

机构：

[1] UNIV TEXAS, DEPT CHEM ENGN, CTR MAT CHEM, AUSTIN, TX 78712 USA

[2] UNIV TEXAS, DEPT CHEM & BIOCHEM, CTR MAT CHEM, AUSTIN, TX 78712 USA

[3] UNIV TEXAS, CTR SYNTH GROWTH & ANAL ELECT MAT, AUSTIN, TX 78712 USA

来源：

CHEMICAL REVIEWS | 1996年 / 96卷 / 04期

关键词：

D O I：

10.1021/cr950236z

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

[No abstract available]

引用

页码：1499 / 1517

页数：19

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