Role of surface chemistry in semiconductor thin film processing

被引：61

作者：

Ekerdt, JG

Sun, YM

Szabo, A

Szulczewski, GJ

White, JM

机构：

[1] UNIV TEXAS, DEPT CHEM ENGN, CTR MAT CHEM, AUSTIN, TX 78712 USA

[2] UNIV TEXAS, DEPT CHEM & BIOCHEM, CTR MAT CHEM, AUSTIN, TX 78712 USA

[3] UNIV TEXAS, CTR SYNTH GROWTH & ANAL ELECT MAT, AUSTIN, TX 78712 USA

来源：

CHEMICAL REVIEWS | 1996年 / 96卷 / 04期

关键词：

D O I：

10.1021/cr950236z

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

[No abstract available]

引用

页码：1499 / 1517

页数：19

共 211 条

[51] STUDIES ON THE MECHANISM OF CHEMICAL SPUTTERING OF SILICON BY SIMULTANEOUS EXPOSURE TO CL-2 AND LOW-ENERGY AR+ IONS [J].

DIELEMAN, J ;

SANDERS, FHM ;

KOLFSCHOTEN, AW ;

ZALM, PC ;

DEVRIES, AE ;

HARING, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05) :1384-1392

[52]

DOI A, 1986, APPL PHYS LETT, V49, P785, DOI 10.1063/1.97546

[53] CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR IC METALLIZATION - PRECURSOR CHEMISTRY AND MOLECULAR-STRUCTURE [J].

DOPPELT, P ;

BAUM, TH .

MRS BULLETIN, 1994, 19 (08) :41-48

[54] SELECTIVITY AND COPPER CHEMICAL VAPOR-DEPOSITION [J].

DUBOIS, LH ;

ZEGARSKI, BR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (11) :3295-3299

[55] SURFACE OPTICAL PHONONS AND HYDROGEN CHEMISORPTION ON POLAR AND NON-POLAR FACES OF GAAS, INP, AND GAP [J].

DUBOIS, LH ;

SCHWARTZ, GP .

PHYSICAL REVIEW B, 1982, 26 (02) :794-802

[56] INFRARED STUDIES OF THE SURFACE AND GAS-PHASE REACTIONS LEADING TO THE GROWTH OF TITANIUM NITRIDE THIN-FILMS FROM TETRAKIS(DIMETHYLAMIDO)TITANIUM AND AMMONIA [J].

DUBOIS, LH ;

ZEGARSKI, BR ;

GIROLAMI, GS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (12) :3603-3609

[57] CHANNEL HOT-CARRIER STRESSING OF REOXIDIZED NITRIDED OXIDE P-MOSFETS [J].

DUNN, GJ ;

KRICK, JT .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (04) :901-906

[58] CHANNEL HOT-CARRIER STRESSING OF REOXIDIZED NITRIDED SILICON DIOXIDE [J].

DUNN, GJ ;

SCOTT, SA .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (07) :1719-1726

[59]

ELSCHENBROICH C, 1979, ORGANOMETALLICS, P13

[60] 2ND-HARMONIC RESPONSE OF CHEMICALLY-MODIFIED VICINAL SI(111) SURFACES [J].

EMMERICHS, U ;

MEYER, C ;

BAKKER, HJ ;

KURZ, H ;

BJORKMAN, CH ;

SHEARON, CE ;

MAO, Y ;

YASUDA, T ;

JING, Z ;

LUCOVSKY, G ;

WHITTEN, JL .

PHYSICAL REVIEW B, 1994, 50 (08) :5506-5511

← 1 2 3 4 5 6 7 8 9 10 →