Direct and indirect causes of Fermi level pinning at the SiO/GaAs interface

被引:25
作者
Winn, Darby L. [1 ]
Hale, Michael J.
Grassman, Tyler J.
Kummel, Andrew C.
Droopad, Ravi
Passlack, Matthias
机构
[1] Univ Calif San Diego, Dept Chem & Biochem, La Jolla, CA 92093 USA
[2] Freescale Semincond Ind, Tempe, AZ 85284 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2363183
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The correlation between atomic bonding sites and the electronic structure of SiO on GaAs(001)-c(2x8)/(2x4) was investigated using scanning tunneling microscopy (STM), scanning tunneling spectroscopy (STS), and density functional theory (DFT). At low coverage, STM images reveal that SiO molecules bond Si end down; this is consistent with Si being undercoordinated and O being fully coordinated in molecular SiO. At similar to 5% ML (monolayer) coverage, multiple bonding geometries were observed. To confirm the site assignments from STM images, DFT calculations were used to estimate the total adsorption energies of the different bonding geometries as a function of SiO coverage. STS measurements indicated that SiO pins the Fermi level midgap at similar to 5% ML coverage. DFT calculations reveal that the direct causes of Fermi level pinning at the SiO GaAs(001)-(2x4) interface are a result of either local charge buildups or the generation of partially filled dangling bonds on Si atoms.(c) 2007 American Institute of Physics.
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页数:12
相关论文
共 53 条
[1]   THE DENSITY OF STATES AT GAAS/NATIVE OXIDE INTERFACES [J].
AHRENKIEL, RK ;
DUNLAVY, DJ .
SOLID-STATE ELECTRONICS, 1984, 27 (05) :485-489
[2]   UNIFIED THEORY OF POINT-DEFECT ELECTRONIC STATES, CORE EXCITONS, AND INTRINSIC ELECTRONIC STATES AT SEMICONDUCTOR SURFACES [J].
ALLEN, RE ;
DOW, JD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :383-387
[3]  
[Anonymous], 2004, HDB CHEM PHYS
[4]   GALLIUM ARSENIDE MOS TRANSISTORS [J].
BECKE, H ;
HALL, R ;
WHITE, J .
SOLID-STATE ELECTRONICS, 1965, 8 (10) :813-&
[5]   DOMAIN FORMATION ON THE RECONSTRUCTED GAAS(001) SURFACE [J].
BEHREND, J ;
WASSERMEIER, M ;
DAWERITZ, L ;
PLOOG, KH .
SURFACE SCIENCE, 1995, 342 (1-3) :63-68
[6]   CORRELATION BETWEEN DEPOSITION CONDITIONS, AUGER ANALYSIS AND ELECTRICAL CHARACTERISTICS OF MBE-GROWN SIO FILMS ON GAAS [J].
BLANCHET, RC ;
DELHOMME, BJ .
VACUUM, 1982, 32 (01) :3-8
[7]   PROJECTOR AUGMENTED-WAVE METHOD [J].
BLOCHL, PE .
PHYSICAL REVIEW B, 1994, 50 (24) :17953-17979
[8]   ARSENIC ON GAAS - FERMI-LEVEL PINNING AND THERMAL-DESORPTION STUDIES [J].
CHIANG, TT ;
SPICER, WE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1989, 7 (03) :724-730
[9]   Evolution of the GaAs(001) surface structure during the transition from the As-rich (2x4) to the Ga-rich (4x2) reconstruction [J].
Chizhov, I ;
Lee, G ;
Willis, RF ;
Lubyshev, D ;
Miller, DL .
SURFACE SCIENCE, 1998, 419 (01) :1-11
[10]   IMPROVED ENHANCEMENT-DEPLETION GAAS MOSFET USING ANODIC OXIDE AS GATE INSULATOR [J].
COLQUHOUN, A ;
KOHN, E ;
HARTNAGEL, HL .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (03) :375-376