Limits to the spatial, energy and momentum resolution of electron energy-loss spectroscopy

被引:161
作者
Egerton, R. F. [1 ]
机构
[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2G7, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
EELS; TEM; radiation effects; Fourier optics; electron scattering;
D O I
10.1016/j.ultramic.2006.11.005
中图分类号
TH742 [显微镜];
学科分类号
摘要
We discuss various factors that determine the performance of electron energy-loss spectroscopy (EELS) and energy-filtered (EFTEM) imaging in a transmission electron microscope. Some of these factors are instrumental and have undergone substantial improvement in recent years, including the development of electron monochromators and aberration correctors. Others, such as radiation damage, delocalization of inelastic scattering and beam broadening in the specimen, derive from basic physics and are likely to remain as limitations. To aid the experimentalist, analytical expressions are given for beam broadening, delocalization length, energy broadening due to core-hole and excited-electron lifetimes, and for the momentum resolution in angle-resolved EELS. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:575 / 586
页数:12
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