Limits to the spatial, energy and momentum resolution of electron energy-loss spectroscopy

被引：161

作者：

Egerton, R. F. ^{[1
]}

机构：

[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2G7, Canada

来源：

ULTRAMICROSCOPY | 2007年 / 107卷 / 08期

基金：

加拿大自然科学与工程研究理事会;

关键词：

EELS; TEM; radiation effects; Fourier optics; electron scattering;

D O I：

10.1016/j.ultramic.2006.11.005

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We discuss various factors that determine the performance of electron energy-loss spectroscopy (EELS) and energy-filtered (EFTEM) imaging in a transmission electron microscope. Some of these factors are instrumental and have undergone substantial improvement in recent years, including the development of electron monochromators and aberration correctors. Others, such as radiation damage, delocalization of inelastic scattering and beam broadening in the specimen, derive from basic physics and are likely to remain as limitations. To aid the experimentalist, analytical expressions are given for beam broadening, delocalization length, energy broadening due to core-hole and excited-electron lifetimes, and for the momentum resolution in angle-resolved EELS. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：575 / 586

页数：12

共 91 条

[71] QUANTAL ASPECTS OF THE SPATIAL-RESOLUTION OF ENERGY-LOSS MEASUREMENTS IN ELECTRON-MICROSCOPY .1. BROAD-BEAM GEOMETRY [J].

RITCHIE, RH .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1981, 44 (04) :931-942

[72]

SATO Y, 1994, MICROBEAM ANAL, V3, P293

[73] WAVENUMBER-RESOLVED ENERGY-LOSS SPECTRA OF CO5SM [J].

SCHATTSCHNEIDER, P ;

FIDLER, J ;

CHOPOV, V .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1983, 31 (01) :25-32

[74] Anisotropic relativistic cross sections for inelastic electron scattering, and the magic angle -: art. no. 045142 [J].

Schattschneider, P ;

Hébert, C ;

Franco, H ;

Jouffrey, B .

PHYSICAL REVIEW B, 2005, 72 (04)

[75] Channeling, localization and the density matrix in inelastic electron scattering [J].

Schattschneider, P ;

Jouffrey, B .

ULTRAMICROSCOPY, 2003, 96 (3-4) :453-462

[76] SPATIAL-RESOLUTION IN SELECTED-AREA EELS [J].

SCHENNER, M ;

SCHATTSCHNEIDER, P .

ULTRAMICROSCOPY, 1994, 55 (01) :31-41

[77]

Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103

[78] ELEMENTAL IMAGING AND RESOLUTION IN ENERGY-FILTERED CONVENTIONAL ELECTRON-MICROSCOPY [J].

SHUMAN, H ;

CHANG, CF ;

SOMLYO, AP .

ULTRAMICROSCOPY, 1986, 19 (02) :121-133

[79] Absorption spectroscopy with sub-angstrom beams: ELS in STEM [J].

Spence, JCH .

REPORTS ON PROGRESS IN PHYSICS, 2006, 69 (03) :725-758

[80] STEM MICROANALYSIS BY TRANSMISSION ELECTRON-ENERGY LOSS SPECTROSCOPY IN CRYSTALS [J].

SPENCE, JCH ;

LYNCH, J .

ULTRAMICROSCOPY, 1982, 9 (03) :267-276

← 1 2 3 4 5 6 7 8 9 10 →