A detailed experimental investigation of impact ionization in n-channel metal-oxide-semiconductor field-effect-transistors at very low drain voltages

被引:7
作者
Anil, KG
Mahapatra, S
Eisele, I
机构
[1] Interuniv Microelect Ctr, B-3001 Louvain, Belgium
[2] Indian Inst Technol, Dept Elect Engn, Bombay 400076, Maharashtra, India
[3] Univ Bundeswehr Munich, Dept Elect Engn, Inst Phys, D-85579 Neubiberg, Germany
关键词
silicon; MOSFET; hot-carrier; impact ionization; Monte-Carlo simulation; electron energy distribution; thermal tail; electron-electron interactions;
D O I
10.1016/S0038-1101(02)00458-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A detailed experimental investigation of impact ionization in n-channel metal-oxide-semiconductor field-effect-transistors (n-MOSFET) for drain voltages close to and below the bandgap voltage is presented. The data is analyzed based on recent full-band Monte-Carlo results available in the literature. It is shown that the broadening of the tail of the electron energy distribution (EED) by electron-electron interactions (EEI) has an observable impact on hot-electron effects of n-MOSFETs of gate length of even 5 mum. Impacts of channel length scaling and gate voltage on the broadening of EED tail by EEI are also examined, and a model to explain the observed dependencies has been proposed. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:995 / 1001
页数:7
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