Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment

被引：66

作者：

Restoin, C ^{[1
]}

Massy, S ^{[1
]}

Darraud-Taupiac, C ^{[1
]}

Barthelemy, A ^{[1
]}

机构：

[1] Univ Limoges, UMR 6615, IRCOM, F-87060 Limoges, France

来源：

OPTICAL MATERIALS | 2003年 / 22卷 / 03期

关键词：

electron beam; lithium mobate; poling; photonic crystals; submicrometer scale;

D O I：

10.1016/S0925-3467(02)00244-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

One and two dimensional structures at the submicrometer scale have been realized on lithium niobate using an innovative technique: the electron beam bombardment associated to chemical etching. The engraved patterns should allow one to get photonic crystal, and particularly photonic bandgap structures at optical wavelength. The method is presented in a first step and then, the influence of the experimental parameters is studied to understand their effects on the process. After optimization, structures of few hundreds nanometers in diameter have been obtained. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：193 / 199

页数：7

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