共 16 条
- [1] ELECTRON-OPTICAL PERFORMANCE OF A SCANNING TUNNELING MICROSCOPE CONTROLLED FIELD-EMISSION MICROLENS SYSTEM [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1855 - 1861
- [2] Electron-beam microcolumns for lithography and related applications [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3774 - 3781
- [3] A SCANNING TUNNELING MICROSCOPE BASED MICROCOLUMN SYSTEM [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12B): : 4232 - 4240
- [4] ARRAYED MINIATURE ELECTRON-BEAM COLUMNS FOR HIGH THROUGHPUT SUB-100 NM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2743 - 2748
- [6] Miniature Schottky electron source [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2468 - 2472
- [7] SUB-40 NM RESOLUTION 1 KEV SCANNING TUNNELING MICROSCOPE FIELD-EMISSION MICROCOLUMN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3503 - 3507
- [8] Fabrication of electron-beam microcolumn aligned by scanning tunneling microscope [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03): : 1499 - 1502
- [9] Construction of STM aligned electron field emission source [J]. JOURNAL DE PHYSIQUE IV, 1996, 6 (C5): : 285 - 289
- [10] PARK JY, 1996, J PHYS IV, V5, P258