Native oxidation of sputter deposited polycrystalline copper thin films during short and long exposure times: Comparative investigation by specular and non-specular grazing incidence X-ray absorption spectroscopy

被引：27

作者：

Keil, P. ^{[2
]}

Frahm, R. ^{[1
]}

Luetzenkirchen-Hecht, D. ^{[1
]}

机构：

[1] Berg Univ Wuppertal, Fachbereich C, Inst Expt Phys, D-42097 Wuppertal, Germany

[2] Max Planck Inst Eisenforsch GmbH, Dept Interface Chem & Surface Engn, D-40237 Dusseldorf, Germany

来源：

CORROSION SCIENCE | 2010年 / 52卷 / 04期

关键词：

Copper; Sputtered films; AFS (EXAFS & XANES); Atmospheric corrosion; Oxidation; Passive films; ANOMALOUS FINE-STRUCTURE; REFLECTION-MODE EXAFS; IN-SITU STM; INITIAL-STAGES; OXIDE-FILMS; SURFACE; SCATTERING; INTERFACE; CORROSION; BEHAVIOR;

D O I：

10.1016/j.corsci.2009.12.012

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin copper-oxide layers formed on Cu-metal due to the exposure to ambient air at short and long time-scales were investigated by means of reflection mode grazing incidence X-ray absorption spectroscopy under specular and non-specular conditions. The quantitative evaluation of near edge X-ray absorption, as well as specular and non-specular EXAFS data measured for various different grazing angles show that the oxide film is best described by a model structure consisting of a duplex type oxide layer with an outer layer of CuO in contact with the gas atmosphere and an inner Cu2O layer at the interface to the underlying Cu-metal. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：1305 / 1316

页数：12

共 81 条

[1]

AIRBROTHER F, 1967, CHEM NIOBIUM TANTALU

[2] X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces [J].

Apen, E ;

Rogers, BR ;

Sellers, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03) :1227-1232

[3] ESCA STUDIES OF NATURALLY PASSIVATED METAL FOILS [J].

BARR, TL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :660-665

[4] ESCA STUDY OF TERMINATION OF PASSIVATION OF ELEMENTAL METALS [J].

BARR, TL .

JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (16) :1801-1810

[5]

BENZI F, 2008, REV SCI INSTRUM, V79, P6

[6] A DIFFRACTION MEASUREMENT OF THE STRUCTURE OF CU2O FILMS GROWN ON COPPER [J].

BORIE, B .

ACTA CRYSTALLOGRAPHICA, 1960, 13 (07) :542-545

[7] NEAR-SURFACE STRUCTURE DETERMINATION USING X-RAY REFLECTION-ABSORPTION SPECTROSCOPY [J].

BORTHEN, P ;

STREHBLOW, HH .

PHYSICA B, 1995, 208 (1-4) :421-422

[8] Grazing incidence X-ray absorption spectroscopy of near surface regions: Possibilities and limitations [J].

Borthen, P ;

Strehblow, HH .

JOURNAL DE PHYSIQUE IV, 1997, 7 (C2) :187-189

[9] THEORY OF THE OXIDATION OF METALS [J].

CABRERA, N ;

MOTT, NF .

REPORTS ON PROGRESS IN PHYSICS, 1948, 12 :163-184

[10] INITIAL STUDY ON COPPER CMP SLURRY CHEMISTRIES [J].

CARPIO, R ;

FARKAS, J ;

JAIRATH, R .

THIN SOLID FILMS, 1995, 266 (02) :238-244

← 1 2 3 4 5 6 7 8 9 →