A hybrid AlGaInAs-silicon evanescent amplifier

被引:118
作者
Park, Hyundai [1 ]
Fang, Alexander W.
Cohen, Oded
Jones, Richard
Paniccia, Mario J.
Bowers, John E.
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Intel Corp, Photon Technol Lab, IL-91031 Jerusalem, Israel
关键词
semiconductor optical amplifiers; siliconon-insulator (SOI) technology;
D O I
10.1109/LPT.2007.891188
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a hybrid AlGaInAs-silicon evanescent amplifier incorporating a silicon waveguide with a III-V gain medium. The optical mode of the hybrid amplifier is mostly confined to the silicon waveguide and evanescently coupled to the AlGaInAs quantum-well (QW) region where optical gain is provided by electrical current injection. These two different material systems are bonded by low-temperature oxygen plasma assisted wafer bonding at 300 degrees C. The fabricated device shows 13 dB of maximum chip gain with 11 dBm of output saturation power. Evanescent coupling allows a lower active region confinement factor to provide a higher saturation output power than amplifiers with centered QWs, which is important for applications that require linear amplification.
引用
收藏
页码:230 / 232
页数:3
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